UVW STAGE

●Size 

Table Size : 150-1200(mm)
Ballscrew Accuracy Grade Code : L / C
Ballscrew Accuracy Grade : C7 / C5 / C3
Repeatability : ±0.005 / ±0.003 / ±0.001 (mm)

Payload : 10kg-120kg
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● Stroke 

± 2.5 x ±2.5 x ± 3° - ± 10 x ±10 x ± 8° (㎛)
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● Position Accuracy

±1 ㎛ - ±5 ㎛ 

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● Flatness / Straightness 

±2.5㎛ per 100 mm 

*해당 제품의 상세도면 , 자료 및 기타스펙은 문의 바랍니다.